Accelrys | Blog

A recent news article by the University of Texas at Dallas (UTD)  highlighted recent joint work by the Department of Materials Science and Engineering and Accelrys on critical surface reactions of Silicon. The research points the way to ”improve semiconductor devices’ performance in health care and solar power applications in particular.”

Who cares? Anybody who uses chips, solar cells, or any other device containing semiconductors (in other words, all of us.)  

Insertion of Nitrogen atom is predicted to occur preferentially at the step edge of Si(111)

 How does the latest research help? A typical semiconductor device consists of a metal oxide semiconductor layer (e.g., HfO₂) deposited on a silicon substrate. As explained by co-author Dr. Mat Halls, formation of an SiO₂interlayer between the silicon substrate and metal oxide can decrease semiconductor performance. One approach to solving this is to introduce a nitride barrier to prevent the growth of interfacial SiO₂. The ability to introduce such heteroatoms into the topmost layers of Si affords additional opportunities to tune the surface properties by enhancing chemical reactivity at these sites to form functional surfaces. But how do you get the nitrogen to stick to the surface?     

In the latest research, published in Nature Materials, used infra-red spectroscopy  to explore the possible formation mechanisms of nitride on silicon surfaces terminated by hydrogen. Calculations using density functional theory (DFT) demonstrated how stepped edges are important to formation of the nitride layers. The reaction mechanism on the stepped surface provides a means of controlling the reaction. As the authors wrote: “The ability to control the reaction … enables the realization of applications … including sensing, electrical and thermal transport, and molecular computing.” This is a beautiful demonstration of the complementarity of theory and experiment. One can deal with facts, but requires interpretation. The other provides detailed explanations at the atomic level, but sometime requires an anchor to the “real world.” Together they can do more. Wouldn’t it be great if all viewpoints could be reconciled this well?